High Temperature/Extreme Environment Silicon Carbide MEMS Sensors
Sandia National Laboratories, NM, United States
Custom piezoelectric MEMS sensors are fabricated on silicon carbide wafers, e.g., for pressure or acceleration. They can withstand temperatures exceeding 600Âº C. The piezoelectric material is aluminum nitride which is thermally compatible with SiC. The sensor is read out by either direct piezoelectric voltage generation or by resonant frequency changes.
Primary Application Area: Electronics, Sensors & Communications
Technology Development Status: Prototype
Technology Readiness Level: TRL 3
FIGURES OF MERIT
Value Proposition: Conventional silicon based sensors are plumed for liquid cooling to extend the temperature range. This introduces uncertainty as the cooling changes the local environment in which the measurement is made. Liquid cooling also requires significant infrastructure and cost in terms of plumbing.
Organization Type: Academic/Gov Lab
Showcase Booth #: 722
GOVT/EXTERNAL FUNDING SOURCES
Government Funding/Support to Date:
Primary Sources of Funding: Other
Looking for: Development / License Partners