MEMS-based Display Technologies: Progress and Development

J. Ma
United States

Keywords: MEMS


Microelectromechanical systems (MEMS)-based technologies can be used for displays like projector, cell phone, tablet and smart watch. Since the digital micromirror device (DMD) was successfully used in projection displays, multi-display technologies based on MEMS have been proposed. In this talk, the progress and develpment of available MEME-based display technologies are discussed, including digital micromirror device (DMD), digital micro-shutter (DMS), interferometric modulator display (IMOD), time multiplexed optical shutter (TMOS) and grating light valve (GLV). The operational concepts and device principals for transmissive, reflective and projection displays are presented. An example of MEMS-based displays will be given to interpret manufacturing procudure and possible challenges in applicaitons.