Texas A&M University,
Keywords: photonic sensor, wearables, real-time chemical detection
Summary:Chip-scale chemical sensors were demonstrated using flexible mid-Infrared photonic circuits consisting of aluminum nitride (AlN) waveguides. The waveguide sensor is bendable because the device thickness is less than 30 µm, which effectively reduces the surface strain. The sensor can differentiate various hydroxyl compounds, and accurately determine the compositions mixtures. Due to the advantages of high mechanical flexibility, the AlN chemical sensor is suitable for wearables and remote environmental monitoring.