Flexible Mid-IR photonic chip for real-time and label-free chemical sensing

P.T. Lin
Texas A&M University,
United States

Keywords: photonic sensor, wearables, real-time chemical detection


Chip-scale chemical sensors were demonstrated using flexible mid-Infrared photonic circuits consisting of aluminum nitride (AlN) waveguides. The waveguide sensor is bendable because the device thickness is less than 30 ┬Ám, which effectively reduces the surface strain. The sensor can differentiate various hydroxyl compounds, and accurately determine the compositions mixtures. Due to the advantages of high mechanical flexibility, the AlN chemical sensor is suitable for wearables and remote environmental monitoring.