Microtales at microscale: from polymer CMUT array for ultrasound imaging to sliding mode control of MEMS devices

E. Cretu
The University of British Columbia,

Keywords: microsystems, MEMS


Microsystems technology witness an impetuous development at different levels, from novel fabrication technologies to their integration in larger complex applications. We will introduce glimpses into such research innovations and challenges in the Adaptive Microsystems (AdaMist) lab at UBC - they are aligned with a vision of low-cost MEMS transducers, combined with mostly digital control techniques. We are the first to report on an innovative microfabrication technology that has led to SU-8 based CMUT (Capacitive Micromachined Ultrasonic Transducer) arrays used to obtain ultrasound images in immersed media. The technology promises to enable conformal ultrasound imaging using CMUT arrays on flexible substrates. Moving from the MEMS device level to its advanced digital control, we will show how sliding mode control can be used for inertial sensors to allow their operation on the stability border, so that their sensitivity is maximized. We will conclude by showing how these two different aspects integrate into a larger research vision explored in the AdaMist lab.