A. Köck, M. Deluca, F. Sosada-Ludwikowska, R. Wimmer, J.S. Niehaus, S. Becker, Ö. Tokmak, S. Steinhauer, M. Sowwan, V. Singh
Materials Center Leoben Forschung GmbH,
Keywords: chemical nanosensors, nanoparticles, CMOS-integration
Summary:Chemical sensor devices are of significant importance for various applications such as air quality monitoring, safety or health. In the last decades, considerable advances have been made in the development of metal oxide gas sensors, which are based on electrical conductance changes due to interaction with surrounding gas molecules. Due to superior properties, nanomaterials such as nanoparticles and nanowires are considered as most promising candidates for the realization of miniaturized, next-generation gas sensors with improved performance regarding sensitivity and selectivity. Multifunctional nanoparticles seem to be key for optimizing the performance of chemical sensor devices. We have fabricated a variety of nanosensor devices based on ultrathin metal oxide films and nanowires, which have been integrated on CMOS-based micro-hotplate chips. These sensors have been functionalized with metallic as well as bimetallic nanoparticles. We have demonstrated that Pt-NPs or AuPd-NPs, for example, strongly increase the sensitivity to carbon monoxide and supress the cross selectivity to humidity in case of SnO2 thin film and CuO-nanowire based devices. We have employed both nanoparticles synthesized in solution, which are ink-jet deposited, as well as nanoparticles, which are implemented by gas phase synthesis directly on the micro-hotplate chips. Advantage as well as disadvantages of both wet and dry functionalization techniques and their potential for real device fabrication will be discussed. E. Brunet, T. Maier, G.C. Mutinati, S. Steinhauer, A. Köck, C. Gspan, W. Grogger, “Comparison of the gas sensing performance of SnO2 thin film and SnO2 nanowire sensors”, Sensors and Actuators B 165 (2012) 110-118 S. Steinhauer, E. Brunet, T. Maier, G.C. Mutinati, A. Köck, „Gas sensing properties of novel CuO nanowire devices“ Sensors and Actuators B 187 (2013) 50-57 G. C. Mutinati, E. Brunet, A. Koeck , S. Steinhauer, O. Yurchenko, E. Laubender, G. Urban, J. Siegert, K. Rohracher, F. Schrank, M. Schrems, “Optimization of CMOS integrated nanocrystalline SnO2 gas sensor devices with bimetallic nanoparticles”, EUROSENSORS 2014, the XXVIII edition of the conference series, Procedia Engineering 87 (2014) 787 – 790 S. Steinhauer, V. Singh, C. Cassidy, C. Gspan, W. Grogger, M. Sowwan, A. Köck, “Single CuO nanowires decorated with size-selected Pd nanoparticles for CO sensing in humid atmosphere”, (2015) Nanotechnology 26 175502 doi:10.1088/0957-4484/26/17/175502 E. Lackner, J. Krainer, R. Wimmer-Teubenbacher, F. Sosada, M. Deluca, A. Köck, E. Laubender, O. Yurchenko, G. Urban, J. Bekacz, K. Rohracher, E. Wachmann, “CMOS integrated tin dioxide gas sensors functionalized with bimetallic nanoparticles for improved carbon monoxide detection”, October 30 – November 2, DOI: 10.1109/ICSENS.2016.7808667, IEEE Sensors (2016).