Lawrence Berkeley National Laboratory,
Keywords: encased cantilevers, optimum spiral scan, microperfusion, EUV resist
Summary:I will present some of the new technologies developed in my lab for high speed imaging of soft materials. These include microperfusion of liquid reactants for better control of concentration and timing, the optimum scan algorithm for high speed scanning and encased cantilevers for gentle imaging. This work culminated in some recent results capturing the dissolution of EUV resists during development at 10 frames per second.