J.U. Lee
University at Albany-SUNY and RadBOX Semi, Inc.,
United States
Keywords: Radhard, 300mm SOI Wafers
Summary:
We have successfully developed manufacturing-ready 300mm Silicon-on-Insulator substrates for radiation-hard (rad-hard) applications, marking a significant milestone as one of the first US manufacturers of 300mm wafers for this critical application. Using the industrial standard 300mm wafer fabrication facility located at the Albany Nanotech, we have developed defect-free SOI wafers ready for volume manufacturing. Rad-hard electronics are critical for DOD and non-DOD applications, particularly for satellites. These dual-use electronic components require special designs because the environment in space is much harsher than that on Earth. In space, satellites are continuously bombarded by ionizing radiation that would render most commercial-grade electronics inoperable in a short time. Additionally, certain global military powers are developing the capability to wipe out whole satellite constellations using nuclear devices that unleash targeted waves of ionizing radiation. The root cause of radiation induced failure is the increased leakage currents of transistors under TID conditions due to trapped charges that are created in the BOX layer. We have engineered our SOI wafers for superior tolerance in the BOX layer thereby surpassing the durability of commercially available SOI wafers. SOI wafers are particularly well suited for rad-hard applications compared to bulk silicon wafers. Electronics made on SOI wafers are naturally more tolerant to radiation than those fabricated on bulk wafers. Electronics fabricated on SOI wafers consume less power, an advantage that can be used to design satellites with increased capabilities. Finally, SOI wafers allow greater flexibility in the design of electronic components than bulk wafers, including high-frequency RF components. While rad-hard electronics are critical for DOD applications, our SOI wafers will have spillover benefits to adjacent applications and agencies, including NASA, commercial satellites, nuclear energy, and medical devices.