A New MEMS-Based Interfacial Force Microscope

J. Cielo, M. Cullinan
University of Texas at Austin,
United States

Keywords: MEMS, IFM, force measurement, chemical bond strength

Summary:

We are developing a new interfacial force microscope using the MEMS platform capable of mechanically measuring chemical bonds with high sensitivity and resolution, comparable to existing methods. This system allows for measurement of force data in regions not accessible to conventional technology, such as AFM.