Metrology-Integrated Microfabrication Course: Closing the Loop Between Process, Measurement and SPC for Workforce Readiness

M.W. Pleil, N. Jackson
University of New Mexico,
United States

Keywords: metrology, microfabrication, statistical process control (SPC), workforce readiness, semiconductor education, process optimization, measurement science, data-driven learning, manufacturing training and technology center (MTTC), industry mindset development

Summary:

Abstract Metrology-Integrated Microfabrication Course: Closing the Loop Between Process, Measurement and SPC for Workforce Readiness Matthias W. Pleil; Ph.D. Nathan Jackson; Ph.D. School of Engineering University of New Mexico This presentation provides an integrated educational model that combines hands-on microfabrication, measurement science (metrology), and Statistical Process Control (SPC) to cultivate a workforce mindset among engineering undergraduate and graduate students. The curriculum embeds metrology tools and data-driven analysis directly into process learning, linking measurement systems (optical microscopy, profilometry, SEM) to thin-film thickness, surface profiles, critical dimensions, and etch rates and selectivity informing cause and effect analysis along with statistical process control (SPC) chart setup. Students develop not only technical skills but also professional competencies such as process optimization, documentation discipline, teamwork, and reflective problem-solving. This model fosters a measurable shift from procedural learning to industry-ready mindset development, preparing students for roles in the semiconductor and advanced manufacturing workforce.